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This paper concentrates on the development and evaluation of linear characteristics of a complex flexure hinge with high accuracy and large stiffness. The flexure hinge mechanism is used to clamp the shaft of a micropositioning stage based on the inchworm principle. Six key parameters of the flexure hinge are optimized by using finite element method. Developed flexure hinge has very good effects on the clamping and resilience that are accurate and reasonable. The evaluation result shows that the flexure hinge has excellent linear characteristic.