No abstract

A novel design concept for the electron optical column has been implemented in the realization of a new ultra-high performance SEM. A compound magnetic/ electrostatic objective lens is at the heart of the high-performance column: the imaging aberrations of this new lens type decrease with decreasing beam energy. Any beam cross-over between the electron source (Schottky FE-gun) and the sample has been eliminated in order to avoid broadening of the beam energy spread (Boersch effect). A high beam energy is maintained throughout the column regardless of the electron probe energy selected by the operator. This protects the beam against the effect of stray fields and minimizes any loss of beam brigthness due to stochastic electron-electron interactions. The new SEM achieves outstanding resolution, particularly at the low beam energies (3 nm achievable at E(PE) = 1 keV). The secondary electrons emitted by the sample are detected with very high efficiency by an internal annular detector situated above the final lens. Due to the low imaging aberration level, a high current can easily be focused in a very small probe, thus making the new SEM ideally suited for high-resolution, quantitative X-ray analysis.

Asbestos amosite fibers were investigated to evaluate the damage caused by a transmission electron microscope (TEM) electron beam. Since elemental x-ray intensity ratios obtained by energy dispersive x-ray spectroscopy (EDS) are commonly used for asbestos identification, the impact of beam damage on these ratios was evaluated. It was determined that the magnesium/silicon ratio best represented the damage caused to the fiber. Various tests showed that most fibers have a current density threshold above which the chemical composition of the fiber is modified. The value of this threshold current density varied depending on the fiber, regardless of fiber diameter, and in some cases could not be determined. The existence of a threshold electron dose was also demonstrated. This value was dependent on the current density used and can be increased by providing a recovery period between exposures to the electron beam. This study also established that the electron beam current is directly related to the damage rate above a current density of 165 A/cm. The large number of different results obtained suggest, that in order to ensure that the amosite fibers are not damaged, analysis should be conducted below a current density of 100 A/cm.