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High-efficiency, large-bandwidth silicon-on-insulator grating coupler based on a fully-etched photonic crystal structure Appl. Phys. Lett. 96, 051126 (2010); 10.1063/1.3304791Monolithically integrated low-loss silicon photonic wires and three-dimensional tapered couplers fabricated by self-profile transformation One of the key challenges facing silicon-based integrated optics is the coupling of light from standard optical fibers to submicron silicon waveguides. As a solution to this problem, we present an adiabatically tapered three-dimensional mode converter based on graytone optical lithography and silicon-on-insulator substrates. Our goal has been to preserve complementary metal-oxidesemiconductor process compatibility to the greatest extent possible. Adiabatic tapers are robust with respect to fabrication imperfections. The graytone lithography fabrication process is discussed, and results are presented from optical coupling experiments. Minimizing silicon surface roughness is critical, and methods are presented for achieving rms roughness values on the subnanometer scale.

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We report the design and operation of a surface-emitting surface acoustic wave (SAW) acousto-optical modulator which behaves as a cm-scale linear hologram in response to an applied electronic waveform. The modulator is formed by an optical waveguide, transducer, and out-coupling surface grating on a 1 mm-thick lithium niobate substrate. We demonstrate the ability to load and illuminate a 9-region linear hologram into the modulator's 8 mm-long interaction region using applied waveforms of 280–320 MHz. To the best of the authors’ knowledge, this is the first demonstration of a monolithically-integrated, surface-emitting SAW modulator fabricated using lithographic techniques. Applications include practical implementations of a holographic display.

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