Abstract-We present high-efficiency grating couplers for coupling between a single-mode fiber and nanophotonic waveguides, fabricated both in silicon-on-insulator (SOI) and InP membranes using BenzoCycloButene wafer bonding. The coupling efficiency is substantially increased by adding a gold bottom mirror to the structures. The measured coupling efficiency to fiber is 69% for SOI grating couplers and 56% for bonded InP membrane grating couplers.

Abstract-We report experimental results on compact and broadband focusing grating couplers, both in silicon-on-insulator (SOI) and gold on SOI. An eight-fold length reduction of the coupling structure from fiber to photonic wire in SOI, as compared to a linear grating and adiabatic taper, is obtained, without performance penalty. A proof of principle is given for a focusing grating coupler in gold on SOI, with 20% fiber-to-focus efficiency.

-We present a technique to trim the resonance of silicon ring resonators. The cladding oxide is compacted by electron beam bombardment, causing strain in the silicon lattice, which leads to a 5 nm resonance shift.

Abstract-We have designed and fabricated an efficient grating coupler for coupling light between optical fibers and silicon-on-insulator waveguides. The coupler consists of 88-nm-wide slits, etched at an angle of 58 to the surface normal. They are defined by direct etching with a focused ion beam, using iodine gas and an alumina hard mask. The measured efficiency is 46%.

Compact metal grating couplers for efficient and broadband coupling between optical fibers and silicon-on-insulator waveguides are proposed and demonstrated. Simulation results for silver, gold, aluminum and copper grating couplers are presented. Using a uniform silver grating, coupling efficiencies are calculated as high as 60 % at a wavelength of 1.55 μm. Metal grating couplers require only one single etching or lift-off step and are therefore very easy to fabricate. As a proof of principle, a gold grating coupler for near-vertical fiber-to-waveguide coupling was fabricated using e-beam writing and lift-off, demonstrating 34 % coupling efficiency and a 1 dB-bandwidth of 40 nm. Measurement data and simulation results are in good agreement.