A phase-encoding electronics capable of compensating for the nonlinearity error in a heterodyne laser interferometer is described. The system consists of the phase demodulating electronics and the nonlinearity compensating electronics. For phase demodulation, we use the phase-quadrature mixing technique. For nonlinearity compensation, the offsets, the amplitudes and the phase of two output signals from the demodulator are adjusted electrically so that their Lissajous figure is a circle. As a result, the correct phase can be obtained. An analysis of the nonlinearity in the heterodyne interferometer and the design of the phase-encoding electronics are presented. The experiment was performed in a Michelson-type interferometer using a transverse Zeeman stabilized He-Ne laser. We demonstrate that this method can encode the phase of a heterodyne interferometer with sub-nanometer accuracy.

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