No abstract

Manufacturing fine metal mask (FMM) is one of the biggest hurdles to realize the ultra‐high definition (UHD) grade AMOLED displays for smartphone and augmented reality (AR). We have developed the state‐of‐the‐art material and processing technology to achieve 800ppi or higher‐resolution FMMs. The Invar thinning and the thermal damage‐free laser ablation process realized us achieving the FMM for UHD displays.

Making a UHD FMM is a key technology for realizing the nextgeneration displays. We reviewed state of the art and the strengths and weaknesses of each technology in terms of material and processing technology to make high resolution FMM.

Manufacturing fine metal mask (FMM) is the biggest hurdle to realize UHD grade AMOLED pixels for smartphone applications and even higher resolutions such as virtual reality displays. We have developed 800ppi or more grade fine metal mask processing system via femtosecond laser with unique thermal damage free process. Thanks to the unique processing strategy, without sacrificing the processing speed, UHD grade FMM is realized for AMOLED mobile displays. KeywordsFine metal mask; ultrashort pulse laser; UHD (Ultra High Definition); taper control; thermal effect free process

Fine metal mask (FMM) is one of the biggest hurdles to realize high resolution AMOLED displays for smartphone and virtual reality (VR). Various kinds of the material and processing technologies for high resolution FMMs are discussed.