In this research, a polydimethylsiloxane nanostamp for nanocontact printing was fabricated by replicating Si nanomoulds. Si moulds of various shapes and sizes were fabricated by interference lithography and deep reactive ion etching. As an anti-adhesion layer, octadecyltrichlorosilane was treated on Si nanomoulds. Further, superhydrophobic surfaces were obtained by self-assembled monolayer treatment on Si nanostructures.
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