Fabrication of PDMS Nano-Stamp by Replicating Si Nano-Moulds Fabricated by Interference Lithography

Byun, Ikjoo; Park, Jongho; Kim, Joon Won; Kim, Beom Joon

doi:10.4028/www.scientific.net/kem.516.25

Cited by 3 publications

(3 citation statements)

References 15 publications

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“…The predominance of PDMS on cell-based chipis based strongly on its gas permeability which is suitable for cell proliferation, as well as its optical clarity and biocompatibility. The current scope of soft lithography techniques allow the versatility to fabricate devices on the micron scale using PDMS, and that limit can be pushed to the nanoscale through newer approaches researched over the past decade [12,13]. In addition, since PDMS is an elastic material, it enables nonleaky fluidic interconnections which facilitates implementation of mechanical microvalves and micropumps [14].…”

Section: Biocompatible Materials and Surface Modificationsmentioning

confidence: 99%

Microfluidic Cell Chips for High-Throughput Drug Screening

et al. 2016

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The current state of screening methods for drug discovery is still riddled with several inefficiencies. Although some widely used high-throughput screening platforms may enhance the drug screening process, their cost and oversimplification of cell-drug interactions pose a translational difficulty. Microfluidic cell-chips resolve many issues found in conventional HTS technology, providing benefits such as reduced sample quantity and integration of 3D cell culture physically more representative of the physiological/pathological microenvironment. In this review, we introduce the advantages of microfluidic devices in drug screening, and outline the critical factors which influence device design, highlighting recent innovations and advances in the field including a summary of commercialization efforts on microfluidic cell chips. Future perspectives of microfluidic cell devices are also provided based on considerations of present technological limitations and translational barriers.

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Section: Biocompatible Materials and Surface Modificationsmentioning

confidence: 99%

Microfluidic Cell Chips for High-Throughput Drug Screening

et al. 2016

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“…Two other studies on PDMS filling into porous alumina also obtained very shallow and incomplete filling [ 7 , 8 ]. Another recent study showed complete filling into large 750-nm diameter holes in the silicon master mold coated with anti-adhesion layer [ 9 ]. In this study, we achieved a hole filling down to sub-200-nm diameter by additional solvent treatment of the mold that was already coated with an anti-adhesion monolayer.…”

Section: Introductionmentioning

confidence: 99%

Effect of mold treatment by solvent on PDMS molding into nanoholes

Con

Cui

2013

Nanoscale Res Lett

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Polydimethylsiloxane (PDMS) is the most popular and versatile material for soft lithography due to its flexibility and easy fabrication by molding process. However, for nanoscale patterns, it is challenging to fill uncured PDMS into the holes or trenches on the master mold that is coated with a silane anti-adhesion layer needed for clean demolding. PDMS filling was previously found to be facilitated by diluting it with toluene or hexane, which was attributed to the great reduction of viscosity for diluted PDMS. Here, we suggest that the reason behind the improved filling for diluted PDMS is that the diluent solvent increases in situ the surface energy of the silane-treated mold and thus the wetting of PDMS to the mold surface. We treated the master mold surface (that was already coated with a silane anti-adhesion monolayer) with toluene or hexane, and found that the filling by undiluted PMDS into the nanoscale holes on the master mold was improved despite the high viscosity of the undiluted PDMS. A simple estimation based on capillary filing into a channel also gives a filling time on the millisecond scale, which implies that the viscosity of PMDS should not be the limiting factor. We achieved a hole filling down to sub-200-nm diameter that is smaller than those of the previous studies using regular Sylgard PDMS (not hard PDMS, Dow Corning Corporation, Midland, MI, USA). However, we are not able to explain using a simple argument based on wetting property why smaller, e.g., sub-100-nm holes, cannot be filled, for which we suggested a few possible factors for its explanation.

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“…However, due to relatively low surface energy and the problem of interfacial adhesion between mold and PDMS, original PDMS nanostructures with higher resolution and smaller size are not available. 27) Direct transfer technology 28,29) can transfer metallic nanopatterns from a original silicon mold to a polymer substrate and can also obtain accurate size and nano-scale structures, effectively avoiding the deficiency of nTP. This method is simple and efficient, however, the silicon mold cannot be used in imprinting process with non-planar substrate because of its brittleness.…”

mentioning

confidence: 99%

Direct metallic nanostructures transfer by flexible contact UV-curable nano-imprint lithography

Fan¹,

Zhang²,

Liu³

et al. 2019

Appl. Phys. Express

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We propose a novel flexible contact ultraviolet (UV)-curable nano-imprint lithography process which can directly transfer metallic nanostructures by UV curing bonding force. The flexible template evaporated with metal acts as a mask, allowing only the structural region to penetrate UV light and transfer surface metallic nanostructures. By this process, aluminum metal grating of different feature sizes had been transferred to abtain single-layer or even multi-layer metallic nanostructures. The minimum width and spacing of the wire grating were 50 nm and sub-20 nm, respectively. Aluminum grating polarizer had also been fabricated and tested demonstrating the practicability of the process. © 2019 The Japan Society of Applied Physics

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Fabrication of PDMS Nano-Stamp by Replicating Si Nano-Moulds Fabricated by Interference Lithography

Cited by 3 publications

References 15 publications

Microfluidic Cell Chips for High-Throughput Drug Screening

Microfluidic Cell Chips for High-Throughput Drug Screening

Effect of mold treatment by solvent on PDMS molding into nanoholes

Direct metallic nanostructures transfer by flexible contact UV-curable nano-imprint lithography

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