We present a fishbone-like lumped-element artificial transmission line to overcome impedance mismatch in a reflection-type Josephson parametric amplifier between a nonlinear resonator and an external transmission line. Using this easily prepared architecture, we design and fabricate a broadband Josephson parametric amplifier, which has gain in an excess of 20 dB with a bandwidth of hundreds of MHz. Furthermore, by varying the working point of the device, the operating frequency of amplification can be tuned in a wide frequency range of 1 GHz while the amplifier operates in the mode of either three-wave mixing or four-wave mixing. Such a parametric amplifier is suitable for engineering applications of superconducting circuit quantum electrodynamics.
We acquire tantalum thin film in its α phase ( α-Ta) using direct-current magnetron sputtering. According to x-ray diffraction results, 110-Ta is dominant. Quarter-wavelength coplanar waveguide resonators are fabricated with the α-Ta film and characterized at millikelvin in a dilution refrigerator. In the single photon regime, an intrinsic quality factor ( Qi) up to [Formula: see text] is obtained in these resonators. At high power, Qi rises to [Formula: see text]. Moreover, we also fabricate an array with 7 × 7 lumped element resonators using the α-Ta film. The array shows excellent uniformity. At high power, Qis of all pixels exceed [Formula: see text]. In the single photon regime, Qis of over 90% pixels exceed [Formula: see text]. Superconducting quantum computing and ultrasensitive electromagnetic wave detectors will benefit a lot from devices based on the α-Ta film.
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