A new and exciting technique for performing DLC deposition on the inside of cylindrical substrates, in particular pipes, will be described. Using the hollow cathode effect (HCE), a high density plasma can be generated within such cylindrical substrates by using Plasma Enhanced Chemical Vapor Deposition (PECVD). As the pipe itself is the vacuum chamber, such high density plasmas can be maintained by using asymmetric bipolar direct current (DC) pulsed power. Very high deposition rates can thus be achieved of the order of 1micron/min. A hydrocarbon precursor (C 2 H 2 ) is used to deposit thick DLC films which are inert and have a high corrosion resistance. Adhesion to the metallic substrate is improved by adding silicon to the DLC layer. These films also have excellent erosion and wear resistant properties and the process can be optimized depending on what film properties are most vital for whatever application the coating is required for. Corrosion and wear resistance are also improved by having a pure DLC layer on top of the deposited structure. The actual process and deposition system will be described in detail as well as how the technology works and how such high density plasmas can be maintained for various lengths and diameters of pipe. Testing of such novel DLC films was done by various techniques and results will be shown of hardness, adhesion, layer thickness, wear and corrosion resistance. A vast number of applications can greatly benefit from this novel process, on both a large and small scale. Examples of such applications would be industrial piping, offshore drilling, chemical delivery systems, gun barrels and medical devices.

A novel technique for depositing thick diamond‐like carbon‐based films on the internal surface of cylindrical substrates, like pipes, tubes and valves, has been developed. Plasma assisted chemical vapour deposition technology is used to generate a high density hollow cathode plasma within the pipe using asymmetric direct current pulse biasing. The pipe itself is the vacuum and plasma chamber. A description of the general properties of the films, as well as the excellent corrosion resistant properties will be discussed. It is believed that the described film can increase the component life in applications where internal surfaces are exposed to highly corrosive and abrasive media.

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Reducing parameter correlations to enhance scatterometry measurement accuracy, precision and tool matching is a crucial component of every modeling effort. Parameter sensitivity can largely depend on the orientation of the plane of incidence relative to the grating orientation. Conventional scatterometry is done with the plane if incidence normal to the grating orientation, whereas azimuthal scatterometry allows measurements at an arbitrary angle or set of angles. A second technique examined in this paper is hybrid metrology where inputs from source tools such as CD-SEM and CD-AFM are used to determine values of critical parameters. The first examples shows LER sensitivity gains by measuring narrow resist lines in an orientation parallel with the long axis of the grating. Hybridization of LER results in a CD and SWA FMP improvement of about 60%. We also showcase the benefits of azimuthal scatterometry measuring resist lines with CD larger than the wavelengths of the incident light. A CD and SWA FMP reduction of about 60% and 30% is obtained using azimuthal scatterometry at 0, 45 and 90 degrees azimuth angles. Hybridization of the ARC SWA after RIE results in CD and resist SWA FMP improvements by over 60% and 30%, respectively.

Infrared astronomical instruments require absorptive coatings on internal surfaces to trap scattered and stray photons. This is typically accomplished with any one of a number of black paints. Although inexpensive and simple to apply, paint has several disadvantages. Painted surfaces can be fragile, prone to shedding particles, and difficult to clean. Most importantly, the vacuum performance is poor. Recently a plasma enhanced chemical vapor deposition (PECVD) process was developed to apply thick (30 µm) diamond-like carbon (DLC) based protective coatings to the interior of oil pipelines. These DLC coatings show much promise as an infrared black for an ultra high vacuum environment. The coatings are very robust with excellent cryogenic adhesion. Their total infrared reflectivity of < 10% at normal incidence approaches that of black paints. We measured outgas rates of <10 -12 Torr liter/sec cm 2 , comparable to bare stainless steel.