A new correlation method for improvement in the selectivity of bulk trap measurements from both capacitance and voltage transients is proposed. It relies on using, for deep-level transient spectroscopy, one of the new weighting functions instead of a weighting function originally proposed by Lang. The proposed method is an extension of Lang’s DLTS method. Analytical expressions for correlation signals are derived. Finally, a comparative analysis of results obtained for the proposed method with those obtained for Lang’s method and the method utilizing an exponential weighting function is made.
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