A p-type semiconductor CuO film with a bandgap energy of 1.4 eV has been prepared by anodic electrodeposition in a basic aqueous solution containing copper nitrate hydrate and ammonium nitrate at 297 K, and the structural, optical, and electrical characterizations were carried out. The randomly-oriented CuO film prepared on a transparent conductive glass substrate showed electrical characteristics of a 1.26 × 103 Ω cm in resistivity, 2.11 × 1016 cm−3 in carrier concentration, and 0.234 cm2 V−1 s−1 in mobility, and a slight photocurrent generation could be observed during light irradiation. The (002)-oriented CuO film could be prepared on the (111)-oriented Au/Si wafer substrate and possessed an excellent photoactivity of a large photocurrent density and quick response compared to those for the randomly oriented CuO film.

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