The vapor-liquid equilibrium of the binary system HF-H20 was determined, especially in the range of low water concentrations. The purity of anhydrous hydrogen fluoride used in this work was 9N (99.9999999%) with a conductivity of 0.7 • 10 -6 Scm-' (water concentration of 0.033 ppm). We elucidated that the vapor-liquid equilibrium of the binary system HF-H20 obeyed Raoult's law below 1 x 10 3 tool dm -3 (18 ppm) water concentration. We determined the activity coefficients of HF and H20 at the boiling point of the binary system HF-H20. Munter et al.(1, 2) reported the vapor-liquid equilibrium

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