We applied an infrared-(IR-) laser-assisted chemical vapor deposition technique to YBa 2 Cu 3 O 7−δ (YBCO) film fabrication in order to enhance the deposition rate to one suitable for commercial applications. IR-laser illumination during deposition effectively suppressed outgrowth of a-axis oriented grains, which strongly diminish the film's current-carrying capacity. As a result, high-performance YBCO films with critical current densities of greater than 1 × 10 6 A cm −2 were successfully obtained at high deposition rates of up to 58 µm h −1 (∼1 µm min −1 ) by this method.

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The micro −CNC −incremental forming syst ¢ m fbr foil materials was developed as a microfactory cell ． The principle of this flexib 且 e sheet metal forming systern is called incremental forming by hammering ， Small increments of sheet metal bending and bulging deformation are generated by hammering ． Repeated step ・ by −step cycles resu 且 t in variously shaped shetl structures without dies ． To reaHze these systems ， small actuators ， such as piezoelectricactuat rs ， small linear sensors ， and an X − Ystage driven by ultrasonic ］ inear motors ， are selected ． The dimension ofapunch ( tip ofthe hammer ) is lOmicrometers in