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Fullerene plasmas generated by pulse-modulated microwaves have been investigated under typical conditions at the Bio-Nano electron cyclotron resonance ion source. The effect of the pulse modulation is distinct from that of simply structured gases, and then the density of the fullerene plasmas increased as decreasing the duty ratio. The density for a pulse width of 10 μs at the period of 100 μs is 1.34 times higher than that for CW mode. We have studied the responses of fullerene and argon plasmas to pulsed microwaves. After the turnoff of microwave power, fullerene plasmas lasted ∼30 times longer than argon plasmas.

We have developed an electron cyclotron resonance ion source apparatus, which is designed for the production of endohedral fullerene. In this study, we irradiated the Fe(+) beam to the C(60) thin film. We changed the experimental condition of the dose and the ion energy. We could observe the Fe + C(60) peak by analysis of the time-of-flight mass spectrometry. The highest intensity of the Fe + C(60) peak was observed at the ion energy of 200 eV. The Fe + C(60) peak intensity tended to become high in the case of long irradiation time and large dose.

The beam transport of N(+) ion and C(60)(+) ion in the Bio-Nano ECRIS with min-B configuration was investigated based on the ion beam profiles. The N(+) beam could be focused under the low-beam current conditions. Also the C(60)(+) beam could be focused in spite of the large space-charge effect which will lead the divergence of the beam. We confirmed that our beam transport system works well even for the C(60)(+) ion beam. We estimated the highest C(60)(+) beam current with the focused beam profile by comparing the N(+) ion beam.

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