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A DC-DC converter composed of charge pumps and regulators has been integrated into a poly-Si TFT LCD that also contains a 6-bit DAC. It has the ability to supply regulated voltages to the 6bit DAC and to the LCD's gate driver circuit.

The lattice strain in excimer laser crystallized polycrystalline Si (poly-Si) thin films reflects the grain growth induced by the laser irradiation. In this report, the measurement of the lattice strain is made by using the energy-dispersive grazingincidence X-ray diffraction with synchrotron radiation. The excimer laser crystallized poly-Si thin films show tensile lattice strain in the directions parallel to the substrate surface. The { 111 } strain increases from 2.2 x iO to 5.0 x iO when the grain size increases from 40 to 200 nm. The strain is anisotropic between the { 111 } strain and the {220} strain in the layer near the substrate interface when the grain size is small. Carrier mobility in a thin film transistor tends to increase when the strain increases and the anisotropy decreases.

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