Thin-film inductors for 1 GHz-drive mobile communication handset application has been demonstrated. This is the possible practical application of soft magnetic films in 1 GHz range. Fe61Al13O26 with Ms=1.2 T, ρ=500 μΩ cm, fr=2 GHz were used for the inductors. L=7.6 nH, R=6.5 Ω, and Q=7.4 were obtained at 1 GHz in a 370 μm×370 μm square four turn spiral of line/space=11 μm/11 μm covered with 0.1-μm-thick slitted Fe61Al13O26 film with Cr underlayer. The L was increased over the flux saturated inductor by 8.6% without any degrade of quality factor.

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Vertically and horizontally aligned micro wire arrays with the magnetic hard axis perpendicular to the length of the wire are micro-fabricated from zero-magnetostrictive CoNbZr film. Annealing produced a 180-degree domain pattern, small coercive force and good permeability. Using the micro wire array with line/space = 9 m/2 m, an RF integrated inductor exhibited = 7 5 nH(+11% of air core's), = 7 6 and = 6 3 (almost same as the air core's).Index Terms-Bi-directional micro wire array, complex permeability, domain pattern, hysteresis curve, inductance, microfabrication, quality factor, RF integrated inductor.