Magnetic RF integrated thin-film inductors

Yamaguchi, Masahiro; Baba, Masahiro; Suezawa, K.; Moizumi, T.; Arai, Ken‐ichi; Shimada, Yutaka; Haga, Akihiro; Tanabe, Shuji; Itō, Keiko

doi:10.1109/mwsym.2000.860942

Cited by 17 publications

(5 citation statements)

References 6 publications

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“…While previous work has demonstrated an increase in inductor frequency due to similar patterning for higher FMR frequencies, either the inductance enhancements of those designs were very low (<1.2×) [20][21][22] or the Q-factors were low (≤2.5) [26]. The inductors shown here are the first to demonstrate overall optimization of inductance enhancement, quality factor, and operating frequency, simultaneously.…”

Section: Resultsmentioning

confidence: 62%

“…The first method of increasing the FMR frequency is to pattern the dimensions of the core so as to maximize the length of the magnetic core parallel to its in-plane uniaxial magnetization. This practice has been shown to increase the FMR frequency while consequently also reducing the permeability as a fundamental trade-off [20][21][22][28][29][30][31][32][33]. The second method builds on this and utilizes ultra-thin laminations in the thickness direction to also increase the FMR frequency [34].…”

Section: Inductance and Bandwidthmentioning

confidence: 99%

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Gigahertz-Band Integrated Magnetic Inductors

El‐Ghazaly

White

Wang

2017

IEEE Trans. Microwave Theory Techn.

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The demand on mobile electronics to continue to shrink in size while increase in efficiency drives the demand on the internal passive components to do the same. Power amplifiers require inductors with small form factors, high quality factors, and high operating frequency in the single-digit GHz range. This work explores the use of magnetic materials to satisfy the needs of power amplifier inductor applications. This paper discusses the optimization choices regarding material selection, device design, and fabrication methodology. The inductors achieved here present the best performance to date for an integrated magnetic core inductor at high frequencies with a 1 nH inductance and peak quality factor of 4 at ∼3 GHz. Such compact inductors show potential for efficiently meeting the need of mobile electronics in the future.

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Section: Resultsmentioning

confidence: 62%

Section: Inductance and Bandwidthmentioning

confidence: 99%

Gigahertz-Band Integrated Magnetic Inductors

El‐Ghazaly

White

Wang

2017

IEEE Trans. Microwave Theory Techn.

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“…Since the inductors are expected to work as one of signal processing elements, initial permeability is of importance. Increase of inductance and factor for an integrated inductor by patterning of film core has already been verified [14], [15], but not high enough for practical use. While another breakthrough to overcome the magnetic and ohmic loss in the gigahertz range is sought for to put the inductors into practical use, development of downsizing technology of electromagnetic compatibility (EMC) making use of magnetic resonance properties of granular films has been accelerated.…”

Section: Applicationsmentioning

confidence: 99%

Granular thin films with high RF permeability

et al. 2003

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Owing to high resistivity and high inplane uniaxial anisotropy, granular films are known to exhibit high permeability at radio frequencies. But this granular resistivity is not high enough to suppress eddy current when they are used at gigahertz frequencies. Recent developments to solve this problem are described. One is patterning the granular films. It is effective to control the inplane anisotropy and to suppress inplane eddy current. Another is deposition of granular films by evaporation. A peculiar fiber structure is formed for which very high resistivity and anisotropy are realized. Finally, a study of using these films as near-field electromagnetic noise absorbers is described, and it is demonstrated that they have high potential as micrometer-scale noise absorbing elements in the gigahertz frequency range.

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“…High-frequency permeability was measured using a permeameter described elsewhere [15]. The capabilities of this permeameter have been validated through cross comparisons between different techniques [16,17]. All measurements were performed at room temperature for the asdeposited films.…”

Section: Sample Fabrication and Characterizationmentioning

confidence: 99%