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The paper presents experimental results of reduction of cupric oxide (CuO) by low-temperature hydrogen plasma in a microwave-assisted plasma set-up. The experiments were carried out at low microwave powers in the range of 600-750 W and low hydrogen flow rates in the range of 0.833 9 10 -6 to 2.5 9 10 -6 m 3 s -1 . In all the experiments for reduction of CuO with hydrogen plasma, an initial induction period was observed in the kinetic plots. The induction period decreases with increase in pressure or temperature. The induction period leads to the formation of active sites for adsorption of H 2 . After the induction period, fast autocatalytic reduction takes place followed by a sluggish period towards the end. The reduction process proceeds in sequential steps through the formation of sub-oxides. The kinetic data fits the Avrami-Erofeev equation with 'n' value close to 3. The resultant activation energy measured during hydrogen plasma processing is around 75.64 kJ mol -1 . This is lower compared to activation energies measured by other methods of reduction indicating a clear advantage.