We have developed a new cluster deposition source, which can be applied to the formation of nanostructured thin films. By our method, clusters are created by a hollow cathode sputtering at high pressure in the range of hundreds of Pa, which are directly deposited onto substrates. A pipe target with small internal diameter of 6 mm is used, and He is injected as a carrier gas while using Ar as a sputtering gas. The cluster size can be controlled between 2 and 6 nm in diameter, and high deposition rates up to 25 nm/min for 6 nm Fe clusters are obtained on a considerably wide substrate. It is also demonstrated that the deposition of 6 nm Fe clusters produces continuous films consisting of very small grains of nearly the same size with depositing clusters.

An in situ monitoring system for plasma-induced reactions in ethanol was developed by infrared absorption spectroscopy in multiple internal reflection geometry. We monitored in situ the preferential decrease in the IR peak intensity of CH3 and OH groups in liquid ethanol. In addition, we monitored in situ the preferential inclusion of OCH3 and free OH groups deposited on a multiple internal reflection prism. Unlike optical emission spectroscopy, the IR-based technique detects non-light-emitting compounds. It presents as a powerful alternative tool for monitoring liquid-phase plasma reactions.

Plasma is becoming increasingly adopted in bioapplications such as plasma medicine and agriculture. This study investigates the interaction between plasma and molecules in living tissues, focusing on plasma-protein interactions. To this end, the reaction of air-pressure air plasma with NH2-terminated self-assembled monolayer is investigated by infrared spectroscopy in multiple internal reflection geometry. The atmospheric-pressure plasma decomposed the NH2components, the characteristic units of proteins. The decomposition is attributed to water clusters generated in the plasma, indicating that protein decomposition by plasma requires humid air.