Single-phase rocksalt-structured Mg x Zn1− x O (x > 0.5) alloy films were grown on MgO substrates using the mist chemical vapor deposition method. A specular surface with a step and terrace structure was obtained. The bandgap was tuned from 5.9 to 7.8 eV as x varied from 0.5 to 1. Deep ultraviolet cathodoluminescence, stemming from near band edge transitions, was observed for Mg0.57Zn0.43O in the 4.8–5.5 eV range, peaking at ∼5.1 eV (∼240 nm) in the 12–100 K range.

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