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The fabrication of fine bumps on a Si chip is an important issue due to the trend of smaller sized and multi-functioning electronics. In this study, a Sn-Cu near eutectic solder bump was fabricated by electroplating. A Si wafer was used as a substrate, while layers of the Under Bump Metallization (UBM) of Al/Cu/Ni/Au (400/300/400/20 nm in each) were coated onto the Si wafer by electron beam evaporation. The bumps on the UBM were plated by a direct current, and the bump size was 20 x 20 x 10 microm with a 50 microm pitch. Characteristics of the electroplated bumps were examined by XRD, EDS and EPMA. A polarization curve was established to find a potential range of electrodeposition of Sn-Cu. By plating with a reduction current density of 1 A/dm2 for 23 min, a near eutectic Sn-Cu bump was obtained. The bump height increased in current density, namely from 2.25 microm at 0.5 A/dm2 to 6.58 microm at 2 A/dm2 from 10 min of plating. In the electroplated state, a beta-Sn and Sn-Cu intermetallic compound (IMC) coexisted in the bumps. Cu3Sn and Ni3Sn4 IMCs were discovered by XRD analysis along the interface between the bump and the UBM.

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Yttria-stabilized tetragonal zirconia polycrystalline (Y-TZP) ceramics have been utilized as a restorative dental material. Presintered Y-TZP ceramics are machined using the Computer-Aided Design and Computer-Aided Manufacturing (CAD/CAM) techniques. In this study, pre-sintered 3 mol % yttria-stabilized zirconia (3Y-TZP) bioceramics reinforced with Al 2 O 3 particles were prepared by sintering at relatively low temperature. The machining characteristics of the developed 3Y-TZP composites were investigated using an end-milling process. A series of experiments were performed on a high speed spindle with several sensors: a tool dynamometer, an acceleration sensor, and an acoustic emission sensor. The tool dynamometer was installed below the work-piece, a three-axis acceleration sensor was installed on the spindle head, and the acoustic emission sensor was installed on the fixture. The machining characteristics of the composites material were evaluated in a high speed machining process under various cutting conditions by changing the cutting speed, depth-of-cut, and feedrate. The machined surface was investigated using SEM photographs.