We report fabrication of a microneedle-based three-electrode integrated electrochemical sensor and in-vitro characterization of this sensor for glucose sensing applications. A piece of silicon was sequentially dry and wet etched to form a 15 × 15 array of tall (approximately 380 μm) sharp silicon microneedles. Iron catalyst was deposited through a SU-8 shadow mask to form the working electrode and counter electrode. A multi-walled carbon nanotube forest was grown directly on the silicon microneedle array and platinum nano-particles were electrodeposited. Silver was deposited on the Si microneedle array through another shadow mask and chlorinated to form a Ag/AgCl reference electrode. The 3-electrode electrochemical sensor was tested for various glucose concentrations in the range of 3∼20 mM in 0.01 M phosphate buffered saline (PBS) solution. The sensor's amperometric response to the glucose concentration is linear and its sensitivity was found to be 17.73 ± 3 μA/mM-cm2. This microneedle-based sensor has a potential to be used for painless diabetes testing applications.

SU-8 has been widely used in a variety of applications for creating structures in micro-scale as well as sub-micron scales for more than 15 years. One of the most common structures made of SU-8 is tall (up to millimeters) high-aspect-ratio (up to 100:1) 3D microstructure, which is far better than that made of any other photoresists. There has been a great deal of efforts in developing innovative unconventional lithography techniques to fully utilize the thick high aspect ratio nature of the SU-8 photoresist. Those unconventional lithography techniques include inclined ultraviolet (UV) exposure, back-side UV exposure, drawing lithography, and moving-mask UV lithography. In addition, since SU-8 is a negative-tone photoresist, it has been a popular choice of material for multiple-photon interference lithography for the periodic structure in scales down to deep sub-microns such as photonic crystals. These innovative lithography techniques for SU-8 have led to a lot of unprecedented capabilities for creating unique micro-and nano-structures. This paper reviews such innovative lithography techniques developed in the past 15 years or so.

We report a vertically-aligned carbon nanotube (CNT) forest on polydimethylsiloxane (PDMS) sheet as a novel widely stretchable and bendable anti-wetting super-lyophobic surface for naturally oxidized gallium-based liquid metals. The vertically-aligned CNT has inherent chemical inertness and a hierarchical texture combining micro/nanoscale roughness; these two characters render the developed sheet as a super-lyophobic substrate against gallium-based liquid metals. The vertically-aligned CNT forest was first grown on Si substrate and then transferred onto a PDMS sheet by imprinting. It was found that the transferred CNT on the PDMS sheet maintained its vertically-aligned nature as well as hierarchical micro/nano surface morphology. It was found that the static contact angles of the gallium-based liquid metal droplet on the CNT on Si and on the CNT on PDMS were both greater than 155° and the contact angle hysteresis on the CNT on Si was 4° and that on the transferred CNT on PDMS was 19°. These measurement results showed that the surface retains a super-lyophobic property before and after the CNT transfer onto PDMS. We tested the CNT on PDMS sheet for its mechanical flexibility using stretching (50% and 100%) and bending (curvature of 0.1 and 0.4 mm−1). We carried out a bouncing test and a rolling test on the stretched/bent CNT on the PDMS sheet and the results confirmed that the flexible sheet maintains anti-wetting characteristics under bending or stretching conditions.

We report the fabrication and characterization of a reversible resonant frequency tunable antenna based on liquid metal actuation. The antenna is composed of a coplanar waveguide fed monopole stub printed on a copper-clad substrate, and a tunnel-shaped microfluidic channel linked to the printed metal. The gallium-based liquid metal can be injected and withdrawn from the channel in response to an applied air pressure. The gallium-based liquid metal is treated with hydrochloric acid to eliminate the oxide layer, and associated wetting/sticking problems, that arise from exposure to an ambient air environment. Elimination of the oxide layer allows for reliable actuation and repeatable and reversible tuning. By controlling the liquid metal slug on-demand with air pressure, the liquid metal can be readily controllable to connect/disconnect to the monopole antenna so that the physical length of the antenna reversibly tunes. The corresponding reversible resonant frequency changes from 4.9 GHz to 1.1 GHz. The antenna properties based on the liquid metal actuation were characterized by measuring the reflection coefficient and agreed well with simulation results. Additionally, the corresponding time-lapse images of controlling liquid metal in the channel were studied. V

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