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The calibration of the performance of an SFM (scanning force microscope) cantilever has gained more and more interest in the past years, particularly due to increasing applications of SFMs for the determination of the mechanical properties of materials, such as biological structures and organic molecules. In this paper, a MEMS-based nano-force actuator with a force resolution up to nN (10 −9 N) is presented to quantitatively determine the stiffness of an SFM cantilever. The principle, structure design and realization of the nano-force actuator are detailed. Preliminary experiments demonstrate that the long-term self-calibration stability of the actuator is better than 3.7 × 10 −3 N m −1 (1σ ) over 1 h. With careful calibration of the stiffness of the actuator, the MEMS actuator has the capability to determine the stiffness of various types of cantilevers (from 100 N m −1 down to 0.1 N m −1 ) with high accuracy. In addition, thanks to the large displacement and force range (up to 8 μm and 1 mN, respectively) of the actuator, the calibration procedure with our MEMS nano-force actuator features simple and active operation, and therefore applicability for different types of quantitative SFMs.

The measurement of hardness has been and continues to be of significant importance to many of the world's manufacturing industries. Conventional hardness testing is the most commonly used method for acceptance testing and production quality control of metals and metallic products. Instrumented indentation is one of the few techniques available for obtaining various property values for coatings and electronic products in the micrometre and nanometre dimensional scales. For these industries to be successful, it is critical that measurements made by suppliers and customers agree within some practical limits.To help assure this measurement agreement, a traceability chain for hardness measurement traceability from the hardness definition to industry has developed and evolved over the past 100 years, but its development has been complicated. A hardness measurement value not only requires traceability of force, length and time measurements but also requires traceability of the hardness values measured by the hardness machine. These multiple traceability paths are needed because a hardness measurement is affected by other influence parameters that are often difficult to identify, quantify and correct. This paper describes the current situation of hardness measurement traceability that exists for the conventional hardness methods (i.e. Rockwell, Brinell, Vickers and Knoop hardness) and for special-application hardness and indentation methods (i.e. elastomer, dynamic, portables and instrumented indentation).

A laser system for displacement measurements, based on the iodine-stabilized He-Ne laser wavelength standard at 633 nm, has been built up. Two resonator mirror moving systems with displacement ranges of 3 and 13 µm respectively were investigated and the guidance deviations of the latter were corrected. An inductive displacement transducer was calibrated using the measuring laser. The overall measurement uncertainty was estimated for the calibration of the inductive transducer for a displacement length of 13 µm.