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The calibration of the performance of an SFM (scanning force microscope) cantilever has gained more and more interest in the past years, particularly due to increasing applications of SFMs for the determination of the mechanical properties of materials, such as biological structures and organic molecules. In this paper, a MEMS-based nano-force actuator with a force resolution up to nN (10 −9 N) is presented to quantitatively determine the stiffness of an SFM cantilever. The principle, structure design and realization of the nano-force actuator are detailed. Preliminary experiments demonstrate that the long-term self-calibration stability of the actuator is better than 3.7 × 10 −3 N m −1 (1σ ) over 1 h. With careful calibration of the stiffness of the actuator, the MEMS actuator has the capability to determine the stiffness of various types of cantilevers (from 100 N m −1 down to 0.1 N m −1 ) with high accuracy. In addition, thanks to the large displacement and force range (up to 8 μm and 1 mN, respectively) of the actuator, the calibration procedure with our MEMS nano-force actuator features simple and active operation, and therefore applicability for different types of quantitative SFMs.

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