We review the most important fabrication techniques for glass and plastic refractive microlenses and we quantitatively characterize in a systematic way the corresponding state-of-the-art microlenses, which we obtained from selected research groups. For all our measurements we rely on three optical instruments: a non-contact optical profiler, a transmission Mach-Zehnder interferometer and a Twyman-Green interferometer. To conclude, we survey and discuss the different fabrication techniques by comparing the geometrical and optical characteristics of the microlenses, the range of materials in which the lenses can be produced, their potential for low-cost fabrication through mass-replication techniques and their suitability for monolithic integration with other micro-optical components.

A method for fabricating microlenses in polycarbonate material is reported. Using a direct-write technique based on scanning excimer laser ablation with a circular beam, we can etch an arbitrary shape in the polymer material. The beam is obtained by imaging a circular aperture onto the polymer surface, and scanning is realized by the translation stage carrying the sample, which makes successive contours with well-chosen diameters and scan velocities. Afterward, to smooth the ablated surface and release it from debris, a large beam aperture covering the full lens area is used to ablate the lens deeper into the substrate. The fabrication process and the characterization method are described, including calculation of the contour set for a desired lens shape. The optical performance is evaluated by Mach-Zehnder interferometry, showing that aberrations below lambda/10 are possible for slow lenses.

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