In this study, we compared three statistical methods including the Bayesian inference to evaluate the lifetime distribution of time-dependent dielectric breakdown with clustered defects. Especially, we focused on the effect of the prior information of the Bayesian inference to obtain an accurate low cumulative failure probability of lifetime distribution. The prior information about the breakdown physics can give an appropriate range of shape parameter of the distribution function. In comparison with the conventional estimation methods, we investigated the influence of sample size and prior distribution on parameter estimation accuracy of the Bayesian inference.
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