Extraordinary Hall effect and x-ray spectroscopy measurements have been performed on a series of Pt/Co/MOx trilayers (M=Al, Mg, Ta, etc.) in order to investigate the role of oxidation in the onset of perpendicular magnetic anisotropy at the Co/MOx interface. It is observed that varying the plasma oxidation time modifies the magnetic properties of the Co layer, inducing a magnetic anisotropy crossover from in plane to out of plane. We focused on the influence of plasma oxidation on Pt/Co/AlOx perpendicular magnetic anisotropy. The interfacial electronic structure is analyzed via x-ray photoelectron spectroscopy measurements. It is shown that the maximum of out-of-plane magnetic anisotropy corresponds to the appearance of a significant density of Co–O bondings at the Co/AlOx interface.

X-ray spectroscopy measurements have been performed on a series of Pt∕Co∕AlOx trilayers to investigate the role of Co oxidation in the perpendicular magnetic anisotropy at the Co∕AlOx interface. It is observed that varying the degree of oxidation modifies the magnetic properties of the Co layer, inducing a magnetic anisotropy crossover from in plane to out of plane. The microscopic structural properties are analyzed via x-ray photoelectron spectroscopy measurements. It is shown that increasing the oxidation time enhances the amount of interfacial oxide, which may be at the origin of perpendicular magnetic anisotropy.

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