Micromachined thin film plate acoustic wave resonators (FPARs) utilizing the lowest order symmetric Lamb wave (S0) propagating in highly textured 2 μm thick aluminium nitride (AlN) membranes have been successfully demonstrated (Yantchev and Katardjiev 2007 IEEE Trans. Ultrason. Ferroelectr. Freq. Control 54 87-95). The proposed devices have a SAW-based design and exhibit Q factors of up to 3000 at a frequency around 900 MHz as well as design flexibility with respect to the required motional resistance. However, a notable drawback of the proposed devices is the non-zero temperature coefficient of frequency (TCF) which lies in the range −20 ppm K −1 to −25 ppm K −1 . Thus, despite the promising features demonstrated, further device optimization is required. In this work temperature compensation of thin AlN film Lamb wave resonators is studied and experimentally demonstrated. Temperature compensation while retaining at the same time the device electromechanical coupling is experimentally demonstrated. The zero TCF Lamb wave resonators are fabricated onto composite AlN/SiO 2 membranes. Q factors of around 1400 have been measured at a frequency of around 755 MHz. Finally, the impact of technological issues on the device performance is discussed in view of improving the device performance.

Improved performance thin-film plate acoustic wave resonators (FPAR) using the lowest order symmetric Lamb wave (S0) propagating in highly textured AlN membranes have been previously demonstrated for the first time. In this work, an experimental study of the resonators' performance vs. a variety of design parameters is performed. Devices operating in the vicinity of the stopband center exhibiting a Q-value of up to 3000 at a frequency of around 875 MHz are demonstrated. Further, low-loss high-Q micromachined 2-port longitudinally coupled thin-film resonators using the S0 mode are demonstrated for the first time. For the analysis of the proposed structures, the coupling-of-modes (COM) approach is successfully employed. Initially, the COM model is used for the extraction of physical parameters from one-port FPAR measurements. Subsequently, using the COM model, a satisfactory agreement with the proposed experimental frequency characteristics of S0 2-port FPARs has been achieved, and possibilities for further improvements in the performance discussed. Finally, the frequency spectrum of the one-port devices has been studied and the excited plate modes at different frequencies identified and presented with their Q-factors and temperature coefficients of frequency (TCF).

Long-term monitoring of organic pollutants in the soil is a major environmental challenge. We propose to meet this issue by the development of a polymer dedicated to selectively react with H2S, coating surface acoustic wave transducers designed as passive cooperative targets with the compound, and probing their response using Ground Penetrating RADAR, thus providing the capability to monitor the presence of H2S in the subsurface environment. The selectivity is brought by including lead(II) cation in a reticulated polymer matrix which can be deposited as a thin layer on a surface acoustic wave sensor. We demonstrate a signal enhancement mechanism in which water absorption magnifies the signal detection, making the sensor most sensitive to H2S in an underground environment saturated with moisture.

A concept for the development of thin film micro-acoustic resonators is demonstrated. The basic principles for the design and fabrication of zero-group-velocity Lamb acoustic wave resonators on c-textured thin aluminum nitride films are presented. The experimental results demonstrate that the zero-group-velocity waves can be employed in high frequency resonators with small form factors.

1.5 and 2 inch LGT, langatate (La3Ga5.5Ta0.5O14) crystals along the X[100], Y[120] and Z[001]-directions were successfully grown by the Czochralski technique.