Compositionally graded barium strontium titanate (BaxSr1−xTiO3 or BST) multilayers (5mol% MgO doped and undoped) were prepared via metallo-organic solution deposition on Pt–Si substrates and characterized electrically at 0.5, 5, and 10GHz. For the undoped BST multilayers, the small-signal dielectric response, tunability, and the loss tangent at 10GHz were 261, 25% at 1778kV∕cm, and 0.078, respectively. On the other hand, the Mg-doped BST multilayers displayed a significant improvement in the loss characteristics at 10GHz (0.039) but the dielectric response and its tunability were lower (189 and 15%, respectively, at 1778kV∕cm).

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