No abstract

The article contains sections titled: 1. Introduction 2. Definition 2.1. Ionic Purity ‐ Conductivity and Resistivity 2.2. Organic Purity 2.3. Particulate Purity 3. Technologies used for Ultrapure Water Processing 3.1. Ion Exchange Resins 3.1.1. Mixed‐Bed Ion Exchangers 3.1.2. Homogeneous Beds 3.2. Membranes 3.2.1. Reverse Osmosis 3.2.2. Ultrafiltration and Nanofiltration 3.2.3. Electrodeionization 3.3. Adsorption ‐ Activated Carbon Beds 3.4. Degasification 3.5. Clarifiers and Chemical Precipitators 3.6. Chemical Chlorine Removal 3.7. Ultraviolet Treatment 3.8. Membrane Contactors 3.9. Piping Materials, Gaskets 4. Analysis 4.1. Ion Chromatography 4.2. pH Measurement 4.3. Conductivity 4.4. Ion‐Selective Electrodes 4.5. Determination of Total Dissolved Solids 4.6. Determination of Total Organic Carbon 4.7. Particle Counters 4.8. Colorimetric Analyzers for Silica and Phosphate 4.9. Dissolved Oxygen Electrodes 4.10. Capillary Electrophoresis 4.11. ORP Chlorine Analyzers 4.12. Nonvolatile Residue Monitors 4.13. Use of On‐line Analyzers and Manually Collected Samples 5. Applications 5.1. Microelectronics Industry 5.2. Pharmaceutical Industry 5.3. Power Industry 5.3.1. Nuclear Power Plants 5.3.2. Fossil Fuel‐Fired Plants 5.4. Chemical Industry 5.4.1. Boiler Feedwater Make‐up 5.4.2. Process Water 6. Future Developments