The authors investigate the optical resonance modes (ORMs) generated in semiconductor microtubes of spiral symmetry by using finite-difference time-domain methods. Even though the tube-wall thickness is much smaller than the light wavelength, modes having an electric field parallel to the tube wall can loop around the tube periphery as ORMs. In addition, the degenerated ORMs present in conventional cylindrical cavities such as whispering gallery modes are broken and separated into two modes due to the spiral asymmetry of the rolled-up microtubes.
We fabricated and experimentally investigated a nanostructure known as a quantum-well (QW) microtube, which is a fine tube with a micron- or nanometer-order diameter fabricated by rolling a semiconductor GaAs QW. Although the wall thickness is only 40 nm, the system retains the quantum properties of a QW, and photoluminescence from the QW subband can be clearly observed. Even though the QW width is sufficiently small to make the QW subband type-II band-aligned, a type-II to type-I transition caused by uniaxial strain in the microtube allows for optical emission.
Micromirrors were fabricated by the micro-origami technique. This technique allows the fabrication of simple and robust hinges for movable parts, and it can be applied to any pair of lattice mismatched epitaxial layers, in semiconductors or metals. A multilayer structure, including AlGaAs/GaAs component layers and an InGaAs strained layer, was grown by molecular beam epitaxy on a GaAs substrate. After definition of the hinge and mirror’s shape by photolithography, the micromirrors were released from the substrate by selective etching. They moved to their final position powered by the strain release in the InGaAs layer. Optical actuation was achieved by irradiation with the 488 nm line of an argon laser, and the mirror’s position was measured by sensing the reflection of a He–Ne laser. Continuous wave irradiation with a power density of 450 mW/mm2 produced an angular deflection of the mirror of around 0.5°. The frequency response of the mirrors shows a resonance at 25 kHz.
Resonance frequency shift of a zinc oxide-(ZnO-) functionalized microcantilever as a response to carbon monoxide (CO) gas has been investigated. Here, ZnO microrods were grown on the microcantilever surface by a hydrothermal method. The measurement of resonance frequency of the microcantilever vibrations due to the gas was carried out in two conditions, that is, gas flow with and without air pumping into an experiment chamber. The results show that the resonance frequency of the ZnO-functionalized microcantilever decreases because of CO in air pumping condition, while it increases when CO is introduced without air pumping. Such change in the resonance frequency is influenced by water vapor condition, and a possible model based on water-CO combination was proposed.
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