An analysis of phase composition of proton-exchanged waveguide layers in LiNbO3 of X, Y and Z crystallographic orientations has been performed based on the mode and IR absorption spectra. Obtained at different technological conditions, the waveguides studied show complex phase composition with different quota of the phases present. The intrinsic stress caused by crystal lattice deformations at a relatively high level of hydrogen doping in the proton-exchanged layers has been estimated by the optical integral method. The results contribute to a better understanding of the properties and characteristics of such waveguides.

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