The aluminum induced layer exchange (ALILE) process allows the formation of thin polycrystalline Si (poly-Si) layers of large grain size on foreign substrates such as glass at low process temperatures. This paper is devoted to a computer simulation study of the kinetics of the ALILE process taking into account the mechanisms of its separate stages: Si diffusion in the AlOx membrane, nucleation and growth of grains, and the formation of preferential (100) orientation. The characteristics of the ALILE process are explained based on the evolution of the Si concentration within the Al layer. In particular it is demonstrated that the characteristic suppression of nucleation after short annealing times results from a decrease in the Si concentration in the Al layer due to the growth of existing grains. A number of important parameters of ALILE process are estimated comparing the results of simulation to the experimental data.
Liquid phase crystallization of silicon (LPC-Si) on glass is a promising method to produce high quality multi-crystalline Si films with macroscopic grains. In this study, we report on recent improvements of our interdigitated back-contact silicon heterojunction contact system (IBC-SHJ), which enabled open circuit voltages as high as 661 mV and efficiencies up to 14.2% using a 13 µm thin n-type LPC-Si absorbers on glass. The influence of the BSF width on the cell performance is investigated both experimentally and numerically. We combine 1D optical simulations using GenPro4 and 2D electrical simulations using Sentaurus™ TCAD to determine the optical and electrical loss mechanisms in order to estimate the potential of our current LPC-Si absorbers. The simulations reveal an effective minority carrier diffusion length of 26 µm and further demonstrate that a doping concentration of 4×10 16 cm-3 and a back surface field width of 60 µm are optimum values to further increase cell efficiencies.
We have investigated the formation of large-grained polycrystalline silicon (poly-Si) films on glass for thin-film solar cells using the 'seed layer concept' which is based on the epitaxial thickening of a thin large-grained poly-Si template (seed layer). Due to the glass substrate all
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