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Surface and trace analysis by highresolution timeofflight secondary ion mass spectrometry J. Vac. Sci. Technol. A 7, 1823 (1989); 10.1116/1.576009New timeofflight mass spectrometer for improved mass resolution, versatility, and mass spectrometry/mass spectrometry studies Rev.Mass resolution of a time-of-flight mass spectrometer with a two-stage electrostatic reflector is calculated for secondary neutral mass spectrometry. The instrument parameters are optimized for energy and space focusing: correcting the flight time difference due to the energy width AE of sputtered particles and the spatial width As of an ionizing laser beam. The effect of As can be compensated by applying an acceleration field to the ionizing region, and the maximum resolution becomes about lOGO for I>.E = lOeVand As = 1.0mm.

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