Articles you may be interested inInductively coupled plasma etching of high aspect ratio two-dimensional photonic crystals in Al-rich AlGaAs and AlGaAsSb J. Vac. Sci. Technol. B 29, 021006 (2011); 10.1116/1.3549125 Selectivity enhancement of GaAs/AlGaAs dry etching by a pulse-excited inductively coupled plasma source
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