Ion beam induced charge microscopy (IBIC microscopy) has been established recently as an
analytical tool for the characterization of various types of semiconductor devices. In this
paper the potential of IBIC microscopy for the analysis of deeply buried structures of high
power devices under biases of more than 2 kV is discussed. Such data are useful in
the design process of high power devices because excessive fields at device edge
regions or within protection elements (e.g. field ring structures) can be avoided.
Since charge collection efficiency within depleted pn junctions is typically 100% for IBIC analysis, the contrast
due to E-field variations within the large depletion regions of high power devices is limited. Here we
will introduce a new approach for enhancing this contrast by using the temporal
information from the IBIC signals gained with a transient IBIC set-up. Simulations and
experimental data will be compared to evaluate the suitability of the new approach. The
device used here is a high voltage diode with a field ring structure which was analysed
using a 2 MeV proton beam.
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