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In this paper, we address a new mechanism of frequency splitting of vibration modes in electrostatically actuated perfectly flat submicron circular nanoplates. The splitting is generated by actuating the nanoplate through asymmetric electrostatic force. We have found that the same natural frequency of two degenerated modes of a circular nanoplate splits into two distinct natural frequencies after applying asymmetric electrostatic force. Further, the frequency difference of the splitted modes can be tuned by varying the magnitude of electrostatic actuation force. Finite element analysis has been used to demonstrate this frequency splitting behaviour. The nature of this type of splitting phenomenon is also compared with frequency splitting of imperfect plates and found significantly different. We also study the effects of geometrical parameters and residual stress on this voltage actuation based frequency splitting behaviour.

In this paper, we present static and dynamic analysis of an electrostatically actuated imperfect circular microplate under transverse pressure. In modelling of the microplate, we have included both von Kármán geometric and electrostatic force nonlinearities in the development of the equation of motion. The equation of motion has been solved using Galerkin based reduced order modelling technique. The developed reduced order model has been first validated by comparing it with finite element simulation results. Further, the effects of imperfection as initial curvature and uniform transverse pressure have been investigated on the static and dynamic characteristics of the electrostatically actuated circular microplate. We have also investigated the effects of imperfection and applied DC voltage on the pressure sensitivity of the circular microplate. We have found that both imperfection and electrostatic load are responsible for appreciable variations in sensitivity. This detailed investigation is useful to design an imperfect micro pressure sensor.