Substituting heteroatoms into graphene can tune its properties for applications ranging from catalysis to spintronics. The further recent discovery that covalent impurities in graphene can be manipulated at atomic precision using a focused electron beam may open avenues towards sub-nanometer device architectures. However, the preparation of clean samples with a high density of dopants is still very challenging. Here, we report vacancy-mediated substitution of aluminium into laser-cleaned graphene, and without removal from our ultra-high vacuum apparatus, study their dynamics under 60 keV electron irradiation using aberration-corrected scanning transmission electron microscopy and spectroscopy. Three- and four-coordinated Al sites are identified, showing excellent agreement with ab initio predictions including binding energies and electron energy-loss spectrum simulations. We show that the direct exchange of carbon and aluminium atoms predicted earlier occurs under electron irradiation, although unexpectedly it is less probable than the same process for silicon. We also observe a previously unknown nitrogen-aluminium exchange that occurs at Al–N double-dopant sites at graphene divacancies created by our plasma treatment.

As a one-atom thick, mechanically strong, and chemically stable material with unique electronic properties, graphene can serve as the basis for a large number of applications. One way to tailor its properties is the controlled introduction of covalently bound heteroatoms into the lattice. In this study, we demonstrate efficient implantation of individual gold atoms into graphene up to a concentration of 1.7×1011 atoms/cm2 via a two-step low-energy ion implantation technique that overcomes the limitation posed by momentum conservation on the mass of the implanted species. Atomic resolution scanning transmission electron microscopy imaging and electron energy-loss spectroscopy reveal gold atoms occupying double vacancy sites in the graphene lattice. The covalently bound gold atoms can sustain intense electron irradiation at 60 kV during the microscopy experiments. At best, only limited indication of plasmonic enhancement is observed. The method demonstrated here can be used to introduce a controlled concentration of gold atoms into graphene, and should also work for other heavier elements with similar electronic structure.

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