Driven by narrow-linewidth bench-top lasers, coherent optical systems spanning optical communications, metrology and sensing provide unrivalled performance. To transfer these capabilities from the laboratory to the real world, a key missing ingredient is a mass-produced integrated laser with superior coherence. Here, we bridge conventional semiconductor lasers and coherent optical systems using CMOS-foundry-fabricated microresonators with record high Q factor over 260 million and finesse over 42,000. Five orders-of-magnitude noise reduction in the pump laser is demonstrated, and for the first time, fundamental noise below 1 Hz 2 Hz −1 is achieved in an electrically-pumped integrated laser. Moreover, the same configuration is shown to relieve dispersion requirements for microcomb generation that have handicapped certain nonlinear platforms. The simultaneous realization of record-high Q factor, highly coherent lasers and frequency combs using foundry-based technologies paves the way for volume manufacturing of a wide range of coherent optical systems.

High optical quality (Q) factors are critically important in optical microcavities, where performance in applications spanning nonlinear optics to cavity quantum electrodynamics is determined. Here, a record Q factor of over 1.1 billion is demonstrated for on-chip optical resonators. Using silica whispering-gallery resonators on silicon, Q-factor data is measured over wavelengths spanning the C/L bands (100 nm) and for a range of resonator sizes and mode families. A record low sub-milliwatt parametric oscillation threshold is also measured in 9 GHz free-spectral-range devices. The results show the potential for thermal silica on silicon as a resonator material.

Hao, Z. Q.; Shen, M.; Xiong, W.; He, X. N.; Xie, Z. Q.; Gao, M.; Li, X. Y.; Zeng, X. Y.; and Lu, Yongfeng, "Accuracy improvement of quantitative analysis by spatial confinement in laser-induced breakdown spectroscopy" (2013

Optical microresonators with high quality (Q) factors are essential to a wide range of integrated photonic devices. Steady efforts have been directed towards increasing microresonator Q factors across a variety of platforms. With success in reducing microfabrication process-related optical loss as a limitation of Q, the ultimate attainable Q, as determined solely by the constituent microresonator material absorption, has come into focus. Here, we report measurements of the material-limited Q factors in several photonic material platforms. High-Q microresonators are fabricated from thin films of SiO2, Si3N4, Al0.2Ga0.8As, and Ta2O5. By using cavity-enhanced photothermal spectroscopy, the material-limited Q is determined. The method simultaneously measures the Kerr nonlinearity in each material and reveals how material nonlinearity and ultimate Q vary in a complementary fashion across photonic materials. Besides guiding microresonator design and material development in four material platforms, the results help establish performance limits in future photonic integrated systems.

Normal group velocity dispersion (GVD) microcombs offer high comb line power and high pumping efficiency compared to bright pulse microcombs. The recent demonstration of normal GVD microcombs using CMOS foundry-produced microresonators is an important step toward scalable production. However, the chromatic dispersion of CMOS devices is large and impairs the generation of broadband microcombs. Here, we report the development of a microresonator in which GVD is reduced due to a coupled-ring resonator configuration. Operating in the turnkey self-injection locking mode, the resonator is integrated in a hybrid manner with a semiconductor laser pump to produce high-power efficiency combs spanning a bandwidth of 9.9 nm (1.22 THz) centered at 1560 nm, corresponding to 62 comb lines. Fast, linear optical sampling of the comb waveform is used to observe the rich set of near-zero GVD comb behaviors, including soliton molecules, switching waves (platicons), and their hybrids. Tuning of the 20 GHz repetition rate by electrical actuation enables servo locking to a microwave reference, which simultaneously stabilizes the comb repetition rate, offset frequency, and temporal waveform. This integrated hybrid system could be used in coherent communications or for ultrastable microwave signal generation by two-point optical frequency division.