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The combination of diffractive optical elements or spatial light modulators with fully synchronized galvo scanners offers a possibility to scale up machining processes with ultra-short pulses to several 100 W of average power with minimal thermal impact. This will be demonstrated with the high-rate applications multi-pulse drilling on the fly and material removal with special intensity distributions up to an average power of 162 W and a removal rate of 16.5 mm3/min. Based on the experimental results strategies to achieve drilling rates of several 10,000 holes/s or removal rates of multiple 10 mm3/min will be discussed.

Ultrafast lasers are frequently used to machine rotational symmetric workpieces either with tangential processing for tools or with a helical gravure approach for structuring cylinders for printing and embossing applications. The highest precision and repeatability for seamless multilayer processing on the surface of a rotational symmetric workpiece can be achieved by synchronizing a galvo scanner and a rotatory axis with the seed of the used laser system. With this technology, a repeatability of better than ±1μm is kept for hundreds of revolutions as it will be demonstrated for applications such as tube cutting and structuring of small embossing rollers.

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