We have developed an innovative and scalable evaporation source with a multi‐apertured injector manifold for uniform OLED material production over large area, non‐rotating panels. The source is integrated with optical monitoring for high precision and instantaneous flux adjustment using a valving mechanism. The modular design allows flexible deposition configurations.

Results of an innovative, valved evaporation source are presented that allows uniform co-evaporation of two or more materials onto 600mmx700mm substrate panels for OLED manufacturing. Key features of the source include high deposition yield on stationary substrates, integral precision flux control, and in-vacuum material refilling for maximum process up-time.