We propose and demonstrate the lateral integration of a VCSEL and a slow-light VCSEL amplifier with in-plane resonant wavelength detuning design, enabling the unidirectional coupling and stable singlemode operation with good beam quality. The modelling and simulation result of the wavelength detuning and unidirectional coupling is shown. A slow light laterally coupled from the VCSEL to the amplifier can be amplified uniformly when the amplifier is pumped above the threshold current. We also present the experimental data of the beam quality, output power and spectrum. The measured data show the increased single-mode output power with good beam quality in comparison with conventional VCSELs. A record single-mode power (40 mW) with narrow beam divergence (<0.06°) is presented.
We demonstrate a solid-state beam scanner based on VCSEL-integrated amplifier for 3D sensing. We realized a record beam-steering angle of 16° with 200 resolution points. The integrated chip size is as small as 1 mm.
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