We investigated the effect of Fe contamination on the electronic properties of dislocation clusters in relation to oxygen precipitation in multicrystalline silicon (mc-Si). Photoluminescence (PL) spectroscopy and mapping were performed at room and liquid-He temperatures on mc-Si wafers before and after Fe contamination. PL spectra consisted of the band-edge emission, the 0.78-eV emission associated with oxygen precipitates, and the dislocation-related D-lines. The Fe contamination increased the electrically active dislocation clusters. Part of these clusters acted as preferential oxygen precipitation sites, and their electronic properties were not further influenced by the Fe contamination.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.