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A Fe-Co based amorphous magnetic alloy, called FCA is electroplated onto silicon substrates. The electrodeposition is carried out in customized electroplating equipment specifically developed for the FCA chemistry. A micro-inductor utilizing a magnetic core made of FCA is developed and integrated into a dc-dc converter. This work demonstrates the first commercially viable and available product utilizing electroplated magnetic materials on a wafer level in the power management industry.

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