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Digital Flex Illu is a fully digital solution which provides SMO functionality to the AIMS ® EUV system by combining an adaptation of the already built-in system metrology with a powerful algorithm and most importantly, without changing the machine hardware. In this paper, we will present the concept of Digital Flex Illu functionality, its significant advantages in combination with a binary aperture-based illumination concept, together with showing imaging results obtained on the AIMS ® EUV prototype system. This digital solution is a paradigm change for the AIMS ® EUV usability and final user, it allows ZEISS to guarantee an agile roadmap for the AIMS ® EUV with limited development effort and great benefits in sustainability and roadmap scaling.