Fig. 1. Microsystem architecture.Abstract-Single-chip systems save the power dissipation that would be required for chip-to-chip communication, resulting in compact, low-power solutions for battery-powered applications. This paper describes the design and measured performance of a fully-functional digital core with a low-jitter, on-chip, MEMS-LC clock reference. This chip has been fabricated in TSMC's 0.18 m MM/RF bulk CMOS process. Maximum power consumption of the complete microsystem is 48.78mW operating at 90MHz on a 1.8V power supply.

Abstract-Newton is a library-based CAD tool with an analytical synthesis engine which has been developed to support the direct synthesis of the physical design and an electromechanically equivalent model of RF-MEMS resonators based on process parameters and performance metrics. Newton provides accuracy comparable to finite element analysis while requiring a fraction of the computation and design time. A comparison of results from synthesis with Newton, design with FEA, and test results from fabricated devices is presented.