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The Kβ x-ray spectra of the elements from Ca to Ge have been systematically investigated using a highresolution antiparallel double-crystal x-ray spectrometer. Each Kβ 1,3 natural linewidth has been corrected using the instrumental function of this type of x-ray spectrometer, and the spin doublet energies have been obtained from the peak position values in Kβ 1,3 x-ray spectra. For all studied elements the corrected Kβ 1 x-ray lines FWHM increase linearly as a function of Z. However, for Kβ 3 x-ray lines this dependence is generally not linear in the case of 3d elements but increases from Sc to Co elements. It has been found that the contributions of satellite lines are considered to be [KM] shake processes. Our theoretically predicted synthetic spectra of Ca, Mn, Cu, and Zn are in very good agreement with our high-resolution measurements, except in the case of Mn, due to the open-shell valence configuration effect (more than 7000 transitions for diagram lines and more than 100 000 transitions for satellite lines) and the influence of the complicated structure of the metallic Mn.

The LIGA process has been developed as a 2.5-dimensional processing method on Si wafers to date. However, we have succeeded in extending the LIGA process to 3D for the first time. 3D-LIGA was achieved by the technical development of 3D X-ray lithography and worm injection molding replication technology with unscrewing. These technologies began from the development of equipment and have developed into quite original technologies. By combining this 3D-LIGA process with a metallization technique that consists of flat and smooth electroplating and isotropic chemical etching, a spiral copper microstructure with a linewidth of 10 mm, a pitch of 20 mm and a thickness of 2 mm was formed on a cylindrical surface made from LCP with a length of 1 mm and a diameter of 0.48 mm. Furthermore, we applied the process to fabricate a spiral microcoil and estimated the electrical properties of the microcoil. The numbers of turns were 15, the inductance was 91 nH and the quality factor was 5.8 for a frequency of 1 GHz. Direct-current resistance was measured as 99 .

X-ray atomic properties of nickel were investigated in a singular approach that combines different experimental techniques to obtain new and useful reliable values of atomic fundamental parameters for X-ray spectrometric purposes and for comparison to theoretical predictions. We determined the mass attenuation coefficients in an energy range covering the L-and K-absorption edges, the K-shell fluorescence yield and the Kβ/Kα and Kβ 1,3/K α1,2 transition probability ratios. The obtained line profiles and linewidths of the Kα and Kβ transitions in Ni can be considered as the contribution of the satellite lines arising from the [KM] shake processes suggested by Deutsch et al. [1] and Ito et al. [2]. Comparison of the new data with several databases showed a good agreement but also discrepancies were found with existing tabulated values.

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