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There has been remarkable progress in generating ultralow-noise microwaves from optical frequency combs in the last decade. While a combination of techniques has enabled tens to hundreds of attoseconds residual jitter in microwave extraction, so far most of research efforts have been focused on extracting single-tone microwaves from combs; there has been no study on the noise properties of photocurrent pulses directly extracted from the photodiode. Here, we reveal that the residual jitter between optical pulses and rising edges of photocurrent pulses can be in the tens of attoseconds regime. The rising-edge jitter is much lower than the falling-edge jitter, and further, this ultralow rising-edge jitter could be obtained by both p-i-n and (modified-)uni-travelling-carrier photodiodes. This finding can be directly used for various edge-sensitive timing applications, and further shows the potential for ultrahigh-precision timing using silicon-photonic-integrable on-chip p-i-n photodiodes.

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Precise and stable synchronization between an optical frequency comb (femtosecond mode-locked laser oscillator or microresonator-based comb) and a microwave oscillator is important for various fields including telecommunication, radio astronomy, metrology, and ultrafast X-ray and electron science. Timing detection and synchronization using electro-optic sampling with an interferometer has been actively used for low-noise microwave generation, long-distance timing transfer, comb stabilization, time-of-flight sensing, and laser-microwave synchronization for ultrafast science facilities. Despite its outstanding performance, there has been a discrepancy in synchronization performance of more than 10 dB between the projected shot-noise-limited noise floor and the measured residual noise floor. In this work, we demonstrate the shot-noise-limited performance of an electro-optic timing detector-based comb-microwave synchronization, which enabled an unprecedented residual phase noise floor of − 174.5    dBc / Hz at 8 GHz carrier frequency (i.e., 53    zs / Hz 1 / 2 timing noise floor), integrated rms timing jitter of 88 as ( 1    Hz    to    1    MHz ), rms timing drift of 319 as over 12 h, and frequency instability of 3.6 × 10 − 20 over 10,000 s averaging time. We identified that bandpass filtering of the microwave signal and optical pulse repetition-rate multiplication are critical for achieving this performance.

The phase noise of microwaves extracted from optical frequency combs is fundamentally limited by thermal and shot noise, which is inherent in photodetection. Saturation of a photodiode due to the high peak power of ultrashort optical pulses, however, prohibits further scaling of white phase noise by increasing incident optical power. Here we demonstrate that the photocurrent pulse shaping via balanced photodetection, which is accomplished by replacing a single photodiode with a balanced photodetector (BPD) and delaying one of the optical pulses, provides a simple and efficient optical-to-electrical interface to increase achievable microwave power and reduces the corresponding thermal noise-limited phase noise by 6-dB. By analysing contributing noise sources, we also show that the thermal noise floor can reach − 166 dBc/Hz even at a low photocurrent of 2-mA (4-mW optical input per photodiode) when using a p-i-n BPD. This finding may be useful for on-chip microwave generation, which consists of standard p-i-n structure photodiodes with relatively low saturation optical power.