A new energy dispersive X-ray spectrometer (EDS) with a microcalorimeter detector equipped with a transmission electron microscope (TEM) has been developed for high- accuracy compositional analysis in the nanoscale. A superconducting transition-edge-sensor-type microcalorimeter is applied as the detector. A cryogen-free cooling system, which consists of a mechanical and a dilution refrigerator, is selected to achieve long-term temperature stability. In order to mount these detector and refrigerators on a TEM, the cooling system is specially designed such that these two refrigerators are separated. Also, the detector position and arrangement are carefully designed to avoid adverse affects between the superconductor detector and the TEM lens system. Using the developed EDS system, at present, an energy resolution of 21.92 eV full-width-at-half maximum has been achieved at the Cr K alpha line. This value is about seven times better than that of the current typical commercial Si(Li) detector, which is usually around 140 eV. The developed microcalorimeter EDS system can measure a wide energy range, 1-20 keV, at one time with this high energy resolution that can resolve peaks from most of the elements. Although several further developments will be needed to enable practical use, highly accurate compositional analysis with high energy resolution will be realized by this microcalorimeter EDS system.

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In recent years, circuit integration and density of semiconductor devices are rapidly increased by the advance of manufacturing technology. SEM is in a common wide use for the evaluation of semiconductor processes in the product fabrication. However, the observation by using SEM has become gradually difficult because of smaller design rules. Accordingly, a new high-resolution electron microscope having the functions of TEM, STEM and SE (Secondary Electron) image is required. It is possible to easily observe for the high-resolution image by using TEM function in comparison with using STEM function. Moreover, the operation should be easy, and the result of observation and analysis should be as rapid and accurate as possible. The JEM-2500SE Nano analysis electron microscope has been developed in order to satisfy such requirements. Figure 1 shows an outer view of the JEM-2500SE. It is an electron microscope of accelerating voltage 200kV with Schottky type field emission electron gun. Specifications of JEM-2500SE are shown in Table 1. The advantages of this new microscope are described in the following.